This short presentation gives an overview of the research on the modelling of dioxygen Secondary Ion Mass Spectrometry (SIMS) for silicon based targets that has been carried out at the Surrey Ion Beam Centre using the programs, TRIDYN and TRI3DYN.
The use of oxygen in the SIMS process was investigated along with the potential surface roughness effects that may not usually be taken into account.
I hope you enjoy the presentation and thank you for watching.
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